ASTM STP 1413 Mechanical Properties of Structural Films
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Muhlstein CL
This STP contains papers presented at the symposium Mechanical Properties of Structural Films held in Orlando, Florida, on 15-16 November 2000. The symposium was sponsored by ASTM Committee E08 on Fatigue and Fracture and by its Subcommittees E08.01 on Research and Education and E08.05 on Cyclic Deformation and Fatigue Crack Formation.
The papers in this publication are grouped into the following categories:
- Fracture and Fatigue of Structural Films
- Elastic Behavior and Residual Stress in Thin Films
- Tensile Testing of Structural Films
- Thermomechanical, Wear, and Radiation Damage of Structural Films
- Specific topics covered by papers in this publication include:
- Brillouin scattering
- acoustic waves
- surface waves
- elastic constants
- effect of nitrogen feedgas
- nano-structured carbon
- nano-indentation
- Young's modulus
- direct strength testing techniques on polysilicon films
- MEMS test structures
- free-standing aluminum microbeams
- tensile testing of thin films
- NiAl thin foils
- electrodeposited gold films
- membranes for MEMS power generation
- fatigue in Si MEMS structures
- geometric nonlinearity
- bifurcation
- magnetron sputtering
- residual stresses
- crystallographic texture
- interferometry for material property measurement (IMaP) methodology
This STP contains information for technical and scientific personnel with general interests in both the measurement and understanding of the mechanical behavior of thin films as well as those with more specific interests such as MEMS designers utilizing CMOS processes.