ASTM E 1508 Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy

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ASTM E 1508 Document Information:

Title
Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy

ASTM International

Publication Date:
Oct 10, 1998

Scope:

This guide is intended to assist those using energy-dispersive spectroscopy (EDS) for quantitative analysis of materials with a scanning electron microscope (SEM) or electron probe microanalyzer (EPMA). It is not intended to substitute for a formal course of instruction, but rather to provide a guide to the capabilities and limitations of the technique and to its use. For a more detailed treatment of the subject, see Goldstein, et al.(Footnote 2) This guide does not cover EDS with a transmission electron microscope (TEM).

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Footnote 2 - Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D. C., Romig, A. D., Jr., Lyman, C. D., Fiori, C., and Lifshin, E., Scanning Electron Microscopy and X-ray Microanalysis, 2nd ed., Plenum Press, New York, 1992.

Keywords:

EDS

elemental analysis

energy-dispersive spectroscopy

light element

matrix correction

microanalysis

phi-rho-z

quantitative analysis

spectrum

standardless analysis

standards

X ray

X-ray microanalysis

ZAF

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