ASTM F 816 Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
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ASTM F 816 Document Information:
Title
Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages
ASTM International
Publication Date:
May 27, 1983
Scope:
This test method applies to hermetic package leak testing to detect
leaks of a broad spectrum in
size with a minimum detection level equal to the sensitivity of the
helium mass spectrometer
equipment used in the test.
This standard does not purport to address all of the safety concerns,
if any, associated with its
use. It is the responsibility of the user of this standard to
establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.
Keywords:
- helium leak check
- hermetic packages
- hybrid microcircuits
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