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ASTM F 1372 Document Information:
Title
Standard Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components
ASTM International
Publication Date:
Apr 15, 1993
Scope:
This test method covers the testing of interior surfaces of components
such as tubing, fittings,
and valves for surface morphology.
This test method applies to all surfaces of tubing, connectors,
regulators, valves, and any metal
component, regardless of size.
Limitations:
This methodology assumes a SEM operator skill level typically achieved
over a 12-month period.
This test method shall be limited to the assessment of pits, stringer,
tears, grooves, scratches,
inclusions, stepped grain boundaries, and other surface anomalies.
However, stains and particles
that may be produced during specimen preparation should be excluded in
the assessment of anomalies.
The values stated in SI units are to be regarded as the standard. The
inch-pound units given in
parentheses are for information only.
This standard does not purport to address all of the safety concerns,
if any, associated with its
use. It is the responsibility of the user of this standard to
establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use. Specific
hazard statements are given in Section 6.
Keywords:
- components
- contamination
- gas distribution
- metallic surface condition
- SEM analysis
- semiconductor processing
- surface condition
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