ASTM E 1577 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
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ASTM E 1577 Document Information:
Title
Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
ASTM International
Publication Date:
Nov 1, 2004
Scope:
This guide covers the information needed to characterize ion beams
used in surface analysis.
This guide does not cover all information required to perform a
sputter depth profile (see
referenced documents), specify any properties of the specimen except
its surface normal, and
discuss the rationale for choosing a particular set of ion beam
parameters (1,7).(Footnote 2) This
guide does assume that the ion flux has a unique direction, that is,
is an ion beam, rather than a
wide spectrum of velocity vectors more typical of a plasma.
This standard does not purport to address all of the safety concerns,
if any, associated with its
use. It is the responsibility of the user of this standard to
establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.
Keywords:
- ion beam sputtering
- surface analysis
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