ASTM E 1813 Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy
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ASTM E 1813 Document Information:
Title
Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy
ASTM International
Publication Date:
Jun 10, 1996
Scope:
This practice covers scanning probe microscopy and describes the
parameters needed for probe shape and orientation.
This practice also describes a method for measuring the shape
and size of a probe tip to be used in scanning probe microscopy.
The method employs special sample shapes, known as probe
characterizers, which can be scanned with a probe microscope to
determine the dimensions of the probe. Mathematical techniques to
extract the probe shape from the scans of the characterizers have
been published (2-5).
This standard does not purport to address all of the safety
concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.
Keywords:
- microscopy
- probe
- scanning
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