ASTM E 1636 Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
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ASTM E 1636 Document Information:
Title
Standard Practice for Analytically Describing Sputter-Depth-Profile Interface Data by an Extended Logistic Function
ASTM International
Publication Date:
Nov 1, 2004
Scope:
This practice covers a systematic method for analyzing
sputter-depth-profile interface data and for
accurately characterizing the shape of the interface region. Interface
profile data are described
with an appropriate analytic function; the parameters of this function
define the interface width,
its asymmetry, and its depth from the original surface. The use of
this practice is recommended in
order that the shapes of composition profiles of interfaces acquired
with different instruments and
techniques on different materials can be unambiguously compared and
interpreted.
This practice is intended to be used to describe the shape of depth
profile data obtained at an
interface between two dissimilar materials for that case in which the
measured concentration of the
outer material goes from 100 to 0 % and the inner material goes from 0
to 100 %.
This standard does not purport to address all of the safety concerns,
if any, associated with its
use. It is the responsibility of the user of this standard to
establish appropriate safety and
health practices and determine the applicability of regulatory
limitations prior to use.
Keywords:
- logistic function
- sputter-depth-profile interface data
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